Inventor
UENO TAKETO
JP22 patents
⚠️ This page may combine multiple inventors who share the name “UENO TAKETO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
9 patentsUS7369223B2May 6, 2008
Method of apparatus for detecting particles on a specimen
HITACHI HIGH TECH CORP25 citations92
US7881520B2Feb 1, 2011
Defect inspection system
HITACHI HIGH TECH CORP9 citations84
US7271908B2Sep 18, 2007
Apparatus and method for measuring alignment accuracy, as well as method and system for manufacturing semiconductor device
HITACHI HIGH TECH CORP6 citations74
US10228332B2Mar 12, 2019
Defect inspection device and defect inspection method
HITACHI HIGH TECH CORP2 citations73
US9683946B2Jun 20, 2017
Method and device for detecting defects and method and device for observing defects
HITACHI HIGH TECH CORP4 citations73
US7817261B2Oct 19, 2010
Method of apparatus for detecting particles on a specimen
HITACHI HIGH TECH CORP4 citations73
US7643140B2Jan 5, 2010
Method and apparatus for inspecting a semiconductor device
HITACHI HIGH TECH CORP6 citations63
US7952700B2May 31, 2011
Method of apparatus for detecting particles on a specimen
HITACHI HIGH TECH CORP2 citations62
US9588055B2Mar 7, 2017
Defect inspection apparatus and defect inspection method
HITACHI HIGH TECH CORP0 citations42
TANIGUCHI ATSUSHI
5 patentsUS8830465B2Sep 9, 2014
Defect inspecting apparatus and defect inspecting method
TANIGUCHI ATSUSHI7 citations83
US8681328B2Mar 25, 2014
Dark-field defect inspecting method, dark-field defect inspecting apparatus, aberration analyzing method, and aberration analyzing apparatus
TANIGUCHI ATSUSHI4 citations72
US9019492B2Apr 28, 2015
Defect inspection device and defect inspection method
TANIGUCHI ATSUSHI2 citations62
US8970836B2Mar 3, 2015
Defect inspecting apparatus and defect inspecting method
TANIGUCHI ATSUSHI2 citations62
US8885037B2Nov 11, 2014
Defect inspection method and apparatus therefor
TANIGUCHI ATSUSHI1 citations51