Inventor
GU YAJUN
US6 patents
⚠️ This page may combine multiple inventors who share the name “GU YAJUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
UNIV MICHIGAN STATE
4 patentsUS8668962B2Mar 11, 2014
Microwave plasma reactors
UNIV MICHIGAN STATE13 citations82
US10494719B2Dec 3, 2019
Methods and apparatus for microwave plasma assisted chemical vapor deposition reactors
UNIV MICHIGAN STATE3 citations69
US9139909B2Sep 22, 2015
Microwave plasma reactors
UNIV MICHIGAN STATE2 citations61
US11702749B2Jul 18, 2023
Methods and apparatus for microwave plasma assisted chemical vapor deposition reactors
UNIV MICHIGAN STATE0 citations59