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Inventor
NAD SHREYA
US
2 patents
Patents
2 patents
US10494719B2
Dec 3, 2019
Methods and apparatus for microwave plasma assisted chemical vapor deposition reactors
UNIV MICHIGAN STATE
3 citations
69
US11702749B2
Jul 18, 2023
Methods and apparatus for microwave plasma assisted chemical vapor deposition reactors
UNIV MICHIGAN STATE
0 citations
59