Inventor
Kontos Alex
US2 patents
Patents
2 patentsUS10600616B2Mar 24, 2020
Apparatus and techniques to treat substrates using directional plasma and point of use chemistry
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC0 citations48
US10128082B2Nov 13, 2018
Apparatus and techniques to treat substrates using directional plasma and point of use chemistry
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC1 citations48