Inventor
MURAZAWA NAOKI
JP5 patents
Patents
5 patentsUS11340163B2May 24, 2022
Method and apparatus for detecting facet region, wafer producing method, and laser processing apparatus
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US10852240B2Dec 1, 2020
Facet region detecting method and detecting apparatus
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US11110549B2Sep 7, 2021
Recess or through-hole forming method and electrode forming method
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US11892282B2Feb 6, 2024
Protective film thickness measuring method
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US12270790B2Apr 8, 2025
Inspection apparatus
DISCO CORP0 citations48