Inventor
MUELLER MICHAEL L
US4 patents
Patents
4 patentsUS6046546AApr 4, 2000
Stabilizer for switch-mode powered RF plasma
ADVANCED ENERGY IND INC89 citations96
US5747935AMay 5, 1998
Method and apparatus for stabilizing switch-mode powered RF plasma processing
ADVANCED ENERGY IND INC102 citations96
US5187580AFeb 16, 1993
High power switch-mode radio frequency amplifier method and apparatus
ADVANCED ENERGY IND INC63 citations93
US6229392B1May 8, 2001
High power switch-mode radio frequency amplifier method and apparatus
ADVANCED ENERGY IND INC8 citations72