Inventor

PATEL PANKAJ T

US2 patents

⚠️ This page may combine multiple inventors who share the name “PATEL PANKAJ T”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

IMEC INTER UNI MICRO ELECTR

1 patent

US6928751B2Aug 16, 2005

Megasonic cleaner and dryer system

IMEC INTER UNI MICRO ELECTR14 citations89

GOLDFINGER TECHNOLOGIES LLC

1 patent

US6923192B2Aug 2, 2005

Stackable process chambers

GOLDFINGER TECHNOLOGIES LLC0 citations45