Inventor
LESKINEN HANNU
FI5 patents
Patents
5 patentsUS7021330B2Apr 4, 2006
Diaphragm valve with reliability enhancements for atomic layer deposition
PLANAR SYSTEMS INC384 citations97
US6941963B2Sep 13, 2005
High-speed diaphragm valve for atomic layer deposition
PLANAR SYSTEMS INC31 citations90
US6907897B2Jun 21, 2005
Diaphragm valve for high-temperature precursor supply in atomic layer deposition
PLANAR SYSTEMS INC30 citations90
US7141095B2Nov 28, 2006
Precursor material delivery system for atomic layer deposition
PLANAR SYSTEMS INC40 citations89
US7191793B2Mar 20, 2007
Diaphragm valve for atomic layer deposition
PLANAR SYSTEMS INC10 citations82