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Inventor
GILES KATHERINE
GB
2 patents
⚠️ This page may combine multiple inventors who share the name “GILES KATHERINE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
AVIZA TECHNOLOGY LTD
1 patent
US7205246B2
Apr 17, 2007
Forming low k dielectric layers
AVIZA TECHNOLOGY LTD
518 citations
92
AVIZA EUROP LTD
1 patent
US7309662B1
Dec 18, 2007
Method and apparatus for forming a film on a substrate
AVIZA EUROP LTD
3 citations
55