Inventor

ENDOU MITSUHIRO

JP6 patents

⚠️ This page may combine multiple inventors who share the name “ENDOU MITSUHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKICO LTD

3 patents

US4535680AAug 20, 1985

Pneumatic servo booster

TOKICO LTD12 citations72

US4469009ASep 4, 1984

Pneumatic booster

TOKICO LTD10 citations72

US5090294AFeb 25, 1992

Pneumatic booster with tubular portion for separately directing air to silencers

TOKICO LTD8 citations70

SUMCO CORP

1 patent

US7632357B2Dec 15, 2009

Silicon wafer cleaning method

SUMCO CORP1 citations49

NAKAMURA TADAAKI

1 patent

US8631735B2Jan 21, 2014

Pneumatic booster

NAKAMURA TADAAKI1 citations37

UEDA MASAHISA

1 patent

US8133325B2Mar 13, 2012

Dry cleaning method for plasma processing apparatus

UEDA MASAHISA0 citations31