Inventor
PATERSON ALEX M
US3 patents
Patents
3 patentsUS7837838B2Nov 23, 2010
Method of fabricating a high dielectric constant transistor gate using a low energy plasma apparatus
APPLIED MATERIALS INC20 citations92
US7645710B2Jan 12, 2010
Method and apparatus for fabricating a high dielectric constant transistor gate using a low energy plasma system
APPLIED MATERIALS INC13 citations83
US7678710B2Mar 16, 2010
Method and apparatus for fabricating a high dielectric constant transistor gate using a low energy plasma system
APPLIED MATERIALS INC7 citations72