Inventor
MANTALAS LYNDA C
US6 patents
⚠️ This page may combine multiple inventors who share the name “MANTALAS LYNDA C”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR
3 patentsUS7655482B2Feb 2, 2010
Chemical mechanical polishing test structures and methods for inspecting the same
KLA TENCOR91 citations97
US7179661B1Feb 20, 2007
Chemical mechanical polishing test structures and methods for inspecting the same
KLA TENCOR68 citations97
US6528818B1Mar 4, 2003
Test structures and methods for inspection of semiconductor integrated circuits
KLA TENCOR60 citations96