Inventor
CHOI KENRIC
US16 patents
⚠️ This page may combine multiple inventors who share the name “CHOI KENRIC”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
15 patentsUS7794544B2Sep 14, 2010
Control of gas flow and delivery to suppress the formation of particles in an MOCVD/ALD system
APPLIED MATERIALS INC49 citations95
US8343279B2Jan 1, 2013
Apparatuses for atomic layer deposition
APPLIED MATERIALS INC26 citations90
US12368024B2Jul 22, 2025
Methods and apparatus for processing a substrate
APPLIED MATERIALS INC2 citations71
US11628456B2Apr 18, 2023
Apparatus for increasing flux from an ampoule
APPLIED MATERIALS INC0 citations62
US11059061B2Jul 13, 2021
Apparatus for increasing flux from an ampoule
APPLIED MATERIALS INC0 citations62
US10752990B2Aug 25, 2020
Apparatus and methods to remove residual precursor inside gas lines post-deposition
APPLIED MATERIALS INC1 citations62
US11566327B2Jan 31, 2023
Methods and apparatus to reduce pressure fluctuations in an ampoule of a chemical delivery system
APPLIED MATERIALS INC0 citations61
US11156494B2Oct 26, 2021
Continuous liquid level measurement detector for closed metal containers
APPLIED MATERIALS INC1 citations61
US12503766B2Dec 23, 2025
Vapor concentration sensors for process chambers
APPLIED MATERIALS INC0 citations55
US9856561B2Jan 2, 2018
Auto-refill ampoule and methods of use
APPLIED MATERIALS INC1 citations51
US9347696B2May 24, 2016
Compact ampoule thermal management system
APPLIED MATERIALS INC1 citations49
US9279604B2Mar 8, 2016
Compact ampoule thermal management system
APPLIED MATERIALS INC0 citations48
US12577663B2Mar 17, 2026
Ampoule for a semiconductor manufacturing precursor
APPLIED MATERIALS INC0 citations47
US11753715B2Sep 12, 2023
Apparatus and methods for controlling concentration of precursors to processing chamber
APPLIED MATERIALS INC0 citations47
US12084771B2Sep 10, 2024
Control of liquid delivery in auto-refill systems
APPLIED MATERIALS INC0 citations41