Inventor
KHER SHREYAS
US7 patents
⚠️ This page may combine multiple inventors who share the name “KHER SHREYAS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
6 patentsUS7794544B2Sep 14, 2010
Control of gas flow and delivery to suppress the formation of particles in an MOCVD/ALD system
APPLIED MATERIALS INC49 citations95
US7601648B2Oct 13, 2009
Method for fabricating an integrated gate dielectric layer for field effect transistors
APPLIED MATERIALS INC89 citations94
US7910446B2Mar 22, 2011
Integrated scheme for forming inter-poly dielectrics for non-volatile memory devices
APPLIED MATERIALS INC39 citations92
US7816200B2Oct 19, 2010
Hardware set for growth of high k and capping material films
APPLIED MATERIALS INC21 citations91
US7547952B2Jun 16, 2009
Method for hafnium nitride deposition
APPLIED MATERIALS INC37 citations91
US8343279B2Jan 1, 2013
Apparatuses for atomic layer deposition
APPLIED MATERIALS INC26 citations90