Inventor
MUTHUKRISHNAN SHANKAR
US6 patents
⚠️ This page may combine multiple inventors who share the name “MUTHUKRISHNAN SHANKAR”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
5 patentsUS7794544B2Sep 14, 2010
Control of gas flow and delivery to suppress the formation of particles in an MOCVD/ALD system
APPLIED MATERIALS INC49 citations95
US12080573B2Sep 3, 2024
Temperature offset and zone control tuning
APPLIED MATERIALS INC2 citations67
US9263265B2Feb 16, 2016
Crystallization of amorphous films and grain growth using combination of laser and rapid thermal annealing
APPLIED MATERIALS INC2 citations62
US10504779B2Dec 10, 2019
Hydrogenation and nitridization processes for reducing oxygen content in a film
APPLIED MATERIALS INC0 citations51
US10236207B2Mar 19, 2019
Hydrogenation and nitridization processes for reducing oxygen content in a film
APPLIED MATERIALS INC0 citations51