Inventor
ISHIMARU TOSHIYUKI
JP5 patents
Patents
5 patentsUS5332627AJul 26, 1994
Field emission type emitter and a method of manufacturing thereof
SONY CORP25 citations92
US8361876B2Jan 29, 2013
Manufacturing method of semiconductor device
SONY CORP10 citations82
US5825468AOct 20, 1998
Exposure system for lithography apparatus
SONY CORP15 citations70
US5574276ANov 12, 1996
Apparatus and method for detecting a dust particle having high purity inert gas atmosphere
SONY CORP14 citations70
US7921386B2Apr 5, 2011
Fabrication method for semiconductor device, exposure method, pattern correction method and semiconductor device
SONY CORP0 citations38