Inventor
OHKUBO AKINORI
JP17 patents
⚠️ This page may combine multiple inventors who share the name “OHKUBO AKINORI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
8 patentsUS7304749B2Dec 4, 2007
Point diffraction interferometer and exposure apparatus and method using the same
CANON KK13 citations83
US7295327B2Nov 13, 2007
Measuring apparatus and exposure apparatus having the same
CANON KK11 citations83
US7379151B2May 27, 2008
Exposure apparatus comprising cleaning apparatus for cleaning mask with laser beam
CANON KK3 citations62
US7199939B2Apr 3, 2007
Immersion optical system and optical apparatus having the same
CANON KK6 citations62
US8009272B2Aug 30, 2011
Method and device for image measurement, exposure apparatus, substrate for image measurement, and device manufacturing method
CANON KK2 citations61
US7414240B2Aug 19, 2008
Particle remover, exposure apparatus having the same, and device manufacturing method
CANON KK0 citations52
US7929113B2Apr 19, 2011
Measurement apparatus, measurement method, exposure apparatus, and device manufacturing method
CANON KK0 citations40
US7911585B2Mar 22, 2011
Measurement apparatus, exposure apparatus, and device manufacturing method
CANON KK0 citations40
OHKUBO AKINORI
5 patentsUS9091614B2Jul 28, 2015
Wavefront optical measuring apparatus
OHKUBO AKINORI7 citations82
US8085384B2Dec 27, 2011
Exposure apparatus
OHKUBO AKINORI5 citations61
US8139215B2Mar 20, 2012
Method for measuring polarization characteristics and measurement apparatus
OHKUBO AKINORI2 citations60
US8314938B2Nov 20, 2012
Method and apparatus for measuring surface profile of an object
OHKUBO AKINORI0 citations51
US8223313B2Jul 17, 2012
Light intensity distribution measurement apparatus and measurement method, and exposure apparatus
OHKUBO AKINORI1 citations50