Inventor

UKEI TOMOAKI

JP3 patents

⚠️ This page may combine multiple inventors who share the name “UKEI TOMOAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

2 patents

US7846293B2Dec 7, 2010

Plasma processing apparatus and method

TOKYO ELECTRON LTD42 citations89

US7713431B2May 11, 2010

Plasma processing method

TOKYO ELECTRON LTD16 citations82

IWASAKI MASAHIDE

1 patent

US8262848B2Sep 11, 2012

Plasma processing apparatus and method

IWASAKI MASAHIDE0 citations47