Inventor

KAMIAN GEORGE

US9 patents

⚠️ This page may combine multiple inventors who share the name “KAMIAN GEORGE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NOVELLUS SYSTEMS INC

3 patents

US7327948B1Feb 5, 2008

Cast pedestal with heating element and coaxial heat exchanger

NOVELLUS SYSTEMS INC582 citations96

US7941039B1May 10, 2011

Pedestal heat transfer and temperature control

NOVELLUS SYSTEMS INC36 citations90

US6561796B1May 13, 2003

Method of semiconductor wafer heating to prevent bowing

NOVELLUS SYSTEMS INC23 citations90

SHRINIVASAN KRISHNA

1 patent

US8137465B1Mar 20, 2012

Single-chamber sequential curing of semiconductor wafers

SHRINIVASAN KRISHNA588 citations94

WATKINS JOHNSON CO

1 patent

US5136975AAug 11, 1992

Injector and method for delivering gaseous chemicals to a surface

WATKINS JOHNSON CO123 citations93

SHRINIVASAN KRISHNAN

1 patent

US8951348B1Feb 10, 2015

Single-chamber sequential curing of semiconductor wafers

SHRINIVASAN KRISHNAN8 citations82

KRAMER KARL-JOSEF

1 patent

US8906218B2Dec 9, 2014

Apparatus and methods for uniformly forming porous semiconductor on a substrate

KRAMER KARL-JOSEF6 citations78

KAMIAN GEORGE

1 patent

US8656860B2Feb 25, 2014

High efficiency epitaxial chemical vapor deposition (CVD) reactor

KAMIAN GEORGE5 citations67

TRUTAG TECH INC

1 patent

US10829864B2Nov 10, 2020

Apparatus and methods for uniformly forming porous semiconductor on a substrate

TRUTAG TECH INC1 citations62