Inventor
PARK JONGGU
KR3 patents
⚠️ This page may combine multiple inventors who share the name “PARK JONGGU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KIM JIN HYUN
2 patentsUS8956516B2Feb 17, 2015
System and apparatus to facilitate physical vapor deposition to modify non-metal films on semiconductor substrates
KIM JIN HYUN0 citations36
US8936703B2Jan 20, 2015
Methods to fabricate non-metal films on semiconductor substrates using physical vapor deposition
KIM JIN HYUN0 citations36