Inventor
HAN KYUHEE
KR13 patents
⚠️ This page may combine multiple inventors who share the name “HAN KYUHEE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
11 patentsUS10199325B2Feb 5, 2019
Semiconductor device and method of fabricating the same
SAMSUNG ELECTRONICS CO LTD14 citations83
US11515201B2Nov 29, 2022
Integrated circuit device including air gaps and method of manufacturing the same
SAMSUNG ELECTRONICS CO LTD5 citations72
US11195696B2Dec 7, 2021
Electron beam generator, plasma processing apparatus having the same and plasma processing method using the same
SAMSUNG ELECTRONICS CO LTD4 citations71
US10347468B2Jul 9, 2019
Plasma processing system, electron beam generator, and method of fabricating semiconductor device
SAMSUNG ELECTRONICS CO LTD5 citations69
US11862514B2Jan 2, 2024
Integrated circuit device including air gaps and method of manufacturing the same
SAMSUNG ELECTRONICS CO LTD0 citations62
US10381461B2Aug 13, 2019
Method of forming a semiconductor device with an injector having first and second outlets
SAMSUNG ELECTRONICS CO LTD2 citations62
US11646263B2May 9, 2023
Semiconductor device and method of manufacturing semiconductor device
SAMSUNG ELECTRONICS CO LTD0 citations59
US10522332B2Dec 31, 2019
Plasma processing system, electron beam generator, and method of fabricating semiconductor device
SAMSUNG ELECTRONICS CO LTD1 citations59
US11133249B2Sep 28, 2021
Semiconductor device
SAMSUNG ELECTRONICS CO LTD1 citations58
US12548746B2Feb 10, 2026
Physical vapor deposition apparatus
SAMSUNG ELECTRONICS CO LTD0 citations44
US10998185B2May 4, 2021
Substrate cleaning method, substrate cleaning apparatus, and method for fabricating a semiconductor device using the apparatus
SAMSUNG ELECTRONICS CO LTD0 citations41