Inventor
TAGO KENJI
JP6 patents
Patents
6 patentsUS5556275ASep 17, 1996
Heat treatment apparatus
TOKYO ELECTRON LTD389 citations97
US5536320AJul 16, 1996
Processing apparatus
TOKYO ELECTRON LTD30 citations91
US6344387B1Feb 5, 2002
Wafer boat and film formation method
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US6156121ADec 5, 2000
Wafer boat and film formation method
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US7700156B2Apr 20, 2010
Method and apparatus for forming silicon oxide film
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US6925731B2Aug 9, 2005
Thin film forming apparatus cleaning method
TOKYO ELECTRON LTD7 citations68