Inventor

MIZUKAMI MITSUO

JP3 patents

Patents

3 patents

US5556275ASep 17, 1996

Heat treatment apparatus

TOKYO ELECTRON LTD389 citations97

US5482558AJan 9, 1996

Heat treatment boat support

TOKYO ELECTRON LTD62 citations95

US5820683AOct 13, 1998

Object-supporting boat

TOKYO ELECTRON LTD21 citations87