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Inventor
COOPER STEVEN P
US
2 patents
⚠️ This page may combine multiple inventors who share the name “COOPER STEVEN P”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SEH AMERICA INC
1 patent
US6849548B2
Feb 1, 2005
Method of reducing particulate contamination during polishing of a wafer
SEH AMERICA INC
7 citations
65
(unassigned)
1 patent
US6063205A
May 16, 2000
Use of H2 O2 solution as a method of post lap cleaning
5 citations
56