Inventor
ROGERS STEVEN ARTHUR
KR3 patents
Patents
3 patentsUS6686594B2Feb 3, 2004
On-line UV-Visible light halogen gas analyzer for semiconductor processing effluent monitoring
AIR PROD & CHEM53 citations94
US6277342B1Aug 21, 2001
Storage and safe delivery of hazardous specialty gases by acid/base reactions with ionic polymers
AIR PROD & CHEM13 citations71
US7485580B2Feb 3, 2009
Method for removing organic electroluminescent residues from a substrate
AIR PROD & CHEM6 citations56