Inventor
MAROULIS PETER JAMES
US4 patents
Patents
4 patentsUS6686594B2Feb 3, 2004
On-line UV-Visible light halogen gas analyzer for semiconductor processing effluent monitoring
AIR PROD & CHEM53 citations94
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Dynamic dilution system
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US7581549B2Sep 1, 2009
Method for removing carbon-containing residues from a substrate
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US7485580B2Feb 3, 2009
Method for removing organic electroluminescent residues from a substrate
AIR PROD & CHEM6 citations56