Inventor
SUDO YUJI
JP5 patents
⚠️ This page may combine multiple inventors who share the name “SUDO YUJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
3 patentsUS6867848B2Mar 15, 2005
Supporting structure of optical element, exposure apparatus having the same, and manufacturing method of semiconductor device
CANON KK47 citations94
US6122114ASep 19, 2000
Optical-element supporting device and optical apparatus
CANON KK71 citations91
US7113263B2Sep 26, 2006
Supporting structure of optical element, exposure apparatus having the same, and manufacturing method of semiconductor device
CANON KK9 citations72