Inventor

MUELDERS THOMAS

DE5 patents

⚠️ This page may combine multiple inventors who share the name “MUELDERS THOMAS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

INFINEON TECHNOLOGIES AG

2 patents

US7339652B2Mar 4, 2008

Apparatus for projecting a pattern into an image plane

INFINEON TECHNOLOGIES AG9 citations80

US7270922B1Sep 18, 2007

Method for determining an edge profile of a volume of a photoresist after a development process

INFINEON TECHNOLOGIES AG0 citations49

QIMONDA AG

2 patents

US7855776B2Dec 21, 2010

Methods of compensating lens heating, lithographic projection system and photo mask

QIMONDA AG2 citations58

US7678408B2Mar 16, 2010

Method for compensating film height modulations in spin coating of a resist film layer

QIMONDA AG0 citations36

ZEISS CARL SMT AG

1 patent

US7456933B2Nov 25, 2008

Method for improving the imaging properties of a projection objective for a microlithographic projection exposure apparatus

ZEISS CARL SMT AG3 citations61