Inventor
KRUPYSHEV ALEXANDER
US19 patents
⚠️ This page may combine multiple inventors who share the name “KRUPYSHEV ALEXANDER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
BROOKS AUTOMATION INC
12 patentsUS8662812B2Mar 4, 2014
Load lock fast pump vent
BROOKS AUTOMATION INC13 citations82
US10134621B2Nov 20, 2018
Substrate transport apparatus
BROOKS AUTOMATION INC5 citations73
US9401294B2Jul 26, 2016
Compact substrate transport system
BROOKS AUTOMATION INC3 citations73
US11764093B2Sep 19, 2023
Automatic wafer centering method and apparatus
BROOKS AUTOMATION INC3 citations71
US10854478B2Dec 1, 2020
Load lock fast pump vent
BROOKS AUTOMATION INC2 citations71
US12142511B2Nov 12, 2024
Substrate processing apparatus
BROOKS AUTOMATION INC1 citations62
US11587813B2Feb 21, 2023
Substrate transport apparatus
BROOKS AUTOMATION INC0 citations62
US11610787B2Mar 21, 2023
Load lock fast pump vent
BROOKS AUTOMATION INC0 citations61
US11088004B2Aug 10, 2021
Automatic wafer centering method and apparatus
BROOKS AUTOMATION INC1 citations61
US9478446B2Oct 25, 2016
Load lock chamber
BROOKS AUTOMATION INC2 citations61
US11569111B2Jan 31, 2023
Substrate processing apparatus
BROOKS AUTOMATION INC1 citations54
US10541157B2Jan 21, 2020
Load lock fast pump vent
BROOKS AUTOMATION INC0 citations49