Inventor
LUONG VINH HOANG
US4 patents
⚠️ This page may combine multiple inventors who share the name “LUONG VINH HOANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LUONG VINH HOANG
3 patentsUS8389416B2Mar 5, 2013
Process for etching silicon with selectivity to silicon-germanium
LUONG VINH HOANG35 citations88
US8334083B2Dec 18, 2012
Etch process for controlling pattern CD and integrity in multi-layer masks
LUONG VINH HOANG16 citations81
US8501628B2Aug 6, 2013
Differential metal gate etching process
LUONG VINH HOANG2 citations59