Inventor
HAYNES ROBERT
US16 patents
⚠️ This page may combine multiple inventors who share the name “HAYNES ROBERT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
6 patentsUS9591770B2Mar 7, 2017
Multi-layer ceramic vacuum to atmosphere electric feed through
KLA TENCOR CORP5 citations72
US9513230B2Dec 6, 2016
Apparatus and method for optical inspection, magnetic field and height mapping
KLA TENCOR CORP3 citations71
US10354832B2Jul 16, 2019
Multi-column scanning electron microscopy system
KLA TENCOR CORP3 citations69
US10438769B1Oct 8, 2019
Array-based characterization tool
KLA TENCOR CORP2 citations68
US10777377B2Sep 15, 2020
Multi-column spacing for photomask and reticle inspection and wafer print check verification
KLA TENCOR CORP0 citations41
US10840056B2Nov 17, 2020
Multi-column scanning electron microscopy system
KLA TENCOR CORP0 citations34