Inventor
TOTH GABOR D
US12 patents
⚠️ This page may combine multiple inventors who share the name “TOTH GABOR D”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR TECH CORP
9 patentsUS7141791B2Nov 28, 2006
Apparatus and method for E-beam dark field imaging
KLA TENCOR TECH CORP53 citations94
US7684609B1Mar 23, 2010
Defect review using image segmentation
KLA TENCOR TECH CORP21 citations92
US6797955B1Sep 28, 2004
Filtered e-beam inspection and review
KLA TENCOR TECH CORP19 citations92
US7164139B1Jan 16, 2007
Wien filter with reduced chromatic aberration
KLA TENCOR TECH CORP26 citations90
US6828571B1Dec 7, 2004
Apparatus and methods of controlling surface charge and focus
KLA TENCOR TECH CORP40 citations89
US6812462B1Nov 2, 2004
Dual electron beam instrument for multi-perspective
KLA TENCOR TECH CORP35 citations88
US7792351B1Sep 7, 2010
Defect review using image segmentation
KLA TENCOR TECH CORP14 citations83
US6952653B2Oct 4, 2005
Single tool defect classification solution
KLA TENCOR TECH CORP18 citations81
US7247849B1Jul 24, 2007
Automated focusing of electron image
KLA TENCOR TECH CORP6 citations71