Inventor

MITOMO KENJI

JP6 patents

⚠️ This page may combine multiple inventors who share the name “MITOMO KENJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI HIGH TECH CORP

2 patents

US7616299B2Nov 10, 2009

Surface inspection method and surface inspection apparatus

HITACHI HIGH TECH CORP6 citations72

US7864310B2Jan 4, 2011

Surface inspection method and surface inspection apparatus

HITACHI HIGH TECH CORP4 citations61

HITACHI LTD

1 patent

US6731384B2May 4, 2004

Apparatus for detecting foreign particle and defect and the same method

HITACHI LTD44 citations92

HITACHI HIGH TECH ELECT ENG CO

1 patent

US6798504B2Sep 28, 2004

Apparatus and method for inspecting surface of semiconductor wafer or the like

HITACHI HIGH TECH ELECT ENG CO32 citations91

MITOMO KENJI

1 patent

US8804108B2Aug 12, 2014

Inspection method and inspection apparatus

MITOMO KENJI0 citations44

OKA KENJI

1 patent

US8949043B2Feb 3, 2015

Surface inspecting apparatus and method for calibrating same

OKA KENJI0 citations38