Inventor

OBUKI TOMOHARU

JP4 patents

⚠️ This page may combine multiple inventors who share the name “OBUKI TOMOHARU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI HIGH TECH CORP

2 patents

US7663104B2Feb 16, 2010

Specimen inspection equipment and how to make electron beam absorbed current images

HITACHI HIGH TECH CORP6 citations71

US7989766B2Aug 2, 2011

Sample inspection apparatus

HITACHI HIGH TECH CORP2 citations61

NAKAMURA MITSUHIRO

1 patent

US8816712B2Aug 26, 2014

Inspection device

NAKAMURA MITSUHIRO4 citations69

OBUKI TOMOHARU

1 patent

US8178840B2May 15, 2012

Specimen inspection equipment and how to make the electron beam absorbed current images

OBUKI TOMOHARU2 citations54