Inventor
DERSTINE MATTHEW
US28 patents
⚠️ This page may combine multiple inventors who share the name “DERSTINE MATTHEW”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
19 patentsUS9775226B1Sep 26, 2017
Method and system for generating a light-sustained plasma in a flanged transmission element
KLA TENCOR CORP22 citations94
US9185788B2Nov 10, 2015
Method and system for controlling convection within a plasma cell
KLA TENCOR CORP17 citations92
US9558858B2Jan 31, 2017
System and method for imaging a sample with a laser sustained plasma illumination output
KLA TENCOR CORP9 citations84
US9390902B2Jul 12, 2016
Method and system for controlling convective flow in a light-sustained plasma
KLA TENCOR CORP13 citations84
US9263238B2Feb 16, 2016
Open plasma lamp for forming a light-sustained plasma
KLA TENCOR CORP10 citations84
US9927094B2Mar 27, 2018
Plasma cell for providing VUV filtering in a laser-sustained plasma light source
KLA TENCOR CORP11 citations83
US9530636B2Dec 27, 2016
Light source with nanostructured antireflection layer
KLA TENCOR CORP7 citations82
US9723703B2Aug 1, 2017
System and method for transverse pumping of laser-sustained plasma
KLA TENCOR CORP14 citations81
US10887974B2Jan 5, 2021
High efficiency laser-sustained plasma light source
KLA TENCOR CORP2 citations73
US9941655B2Apr 10, 2018
High power broadband light source
KLA TENCOR CORP3 citations73
US9721761B2Aug 1, 2017
Open plasma lamp for forming a light-sustained plasma
KLA TENCOR CORP4 citations73
US9655225B2May 16, 2017
Method and system for controlling convection within a plasma cell
KLA TENCOR CORP2 citations73
US11262591B2Mar 1, 2022
System and method for pumping laser sustained plasma with an illumination source having modified pupil power distribution
KLA TENCOR CORP2 citations67
US10976025B2Apr 13, 2021
Plasma cell for providing VUV filtering in a laser-sustained plasma light source
KLA TENCOR CORP0 citations62
US10714327B2Jul 14, 2020
System and method for pumping laser sustained plasma and enhancing selected wavelengths of output illumination
KLA TENCOR CORP1 citations62
US10568195B2Feb 18, 2020
System and method for pumping laser sustained plasma with a frequency converted illumination source
KLA TENCOR CORP0 citations52
US9887076B2Feb 6, 2018
Method and system for controlling convective flow in a light-sustained plasma
KLA TENCOR CORP0 citations52
US10495287B1Dec 3, 2019
Nanocrystal-based light source for sample characterization
KLA TENCOR CORP0 citations51
US9534848B2Jan 3, 2017
Method and apparatus to reduce thermal stress by regulation and control of lamp operating temperatures
KLA TENCOR CORP1 citations48
KLA CORP
5 patentsUS11778720B2Oct 3, 2023
High efficiency laser-sustained plasma light source with collection of broadband radiation
KLA CORP1 citations62
US11121521B2Sep 14, 2021
System and method for pumping laser sustained plasma with interlaced pulsed illumination sources
KLA CORP1 citations58
US11921297B2Mar 5, 2024
System and method for pumping laser sustained plasma with an illumination source having modified pupil power distribution
KLA CORP0 citations57
US11262664B2Mar 1, 2022
System and method for protecting optics from vacuum ultraviolet light
KLA CORP0 citations54
US12510692B2Dec 30, 2025
Protection of optical materials of optical components from radiation degradation
KLA CORP0 citations53