Inventor

YAMATANI DAIKI

JP4 patents

⚠️ This page may combine multiple inventors who share the name “YAMATANI DAIKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

USHIO ELECTRIC INC

2 patents

US6982421B2Jan 3, 2006

Extreme ultraviolet source

USHIO ELECTRIC INC5 citations58

US10609802B2Mar 31, 2020

High-temperature plasma raw material supply apparatus and extreme ultra violet light source apparatus

USHIO ELECTRIC INC0 citations34

YAMATANI DAIKI

2 patents

US8841625B2Sep 23, 2014

Method for the detection of the irradiance distribution in an extreme ultraviolet light source device and an extreme ultraviolet light source device

YAMATANI DAIKI3 citations53

US8785893B2Jul 22, 2014

Extreme ultraviolet light source and positioning method of light focusing optical means

YAMATANI DAIKI1 citations42