Inventor
TOGASHI KEN
JP9 patents
⚠️ This page may combine multiple inventors who share the name “TOGASHI KEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
DISCO CORP
7 patentsUS10094951B2Oct 9, 2018
Determining apparatus for determining object stored in cassette
DISCO CORP2 citations71
US6494197B1Dec 17, 2002
Dicing machine for cutting CSP plate into pellets
DISCO CORP10 citations71
US10090186B2Oct 2, 2018
Chuck table
DISCO CORP4 citations70
US9517962B2Dec 13, 2016
Plate-shaped object processing method
DISCO CORP3 citations70
US10629462B2Apr 21, 2020
Wafer processing system
DISCO CORP0 citations40
US10490450B2Nov 26, 2019
Electrostatic chuck table
DISCO CORP0 citations40
US10242904B2Mar 26, 2019
Transfer apparatus, processing apparatus, and transfer method
DISCO CORP0 citations40