Inventor
DHALLUIN FLORIAN DIDIER ALBIN
NL3 patents
Patents
3 patentsUS10228615B2Mar 12, 2019
Membranes for use within a lithographic apparatus and a lithographic apparatus comprising such a membrane
ASML NETHERLANDS BV17 citations93
US10698312B2Jun 30, 2020
Membranes for use within a lithographic apparatus and a lithographic apparatus comprising such a membrane
ASML NETHERLANDS BV8 citations82
US10139725B2Nov 27, 2018
Lithographic apparatus
ASML NETHERLANDS BV6 citations69