Inventor

SCACCABAROZZI LUIGI

NL12 patents

⚠️ This page may combine multiple inventors who share the name “SCACCABAROZZI LUIGI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

5 patents

US10228615B2Mar 12, 2019

Membranes for use within a lithographic apparatus and a lithographic apparatus comprising such a membrane

ASML NETHERLANDS BV17 citations93

US10698312B2Jun 30, 2020

Membranes for use within a lithographic apparatus and a lithographic apparatus comprising such a membrane

ASML NETHERLANDS BV8 citations82

US10678140B2Jun 9, 2020

Suppression filter, radiation collector and radiation source for a lithographic apparatus; method of determining a separation distance between at least two reflective surface levels of a suppression filter

ASML NETHERLANDS BV3 citations72

US10139725B2Nov 27, 2018

Lithographic apparatus

ASML NETHERLANDS BV6 citations69

US9606445B2Mar 28, 2017

Lithographic apparatus and method of manufacturing a device

ASML NETHERLANDS BV5 citations68

STEINHOFF JENS ARNO

1 patent

US9298110B2Mar 29, 2016

Radiation source apparatus, lithographic apparatus, method of generating and delivering radiation and method for manufacturing a device

STEINHOFF JENS ARNO6 citations65

LAMMERS NICOLAAS ARNOLDUS

1 patent

US9563137B2Feb 7, 2017

Lithographic apparatus and device manufacturing method

LAMMERS NICOLAAS ARNOLDUS2 citations57

EHM DIRK HEINRICH

1 patent

US8477285B2Jul 2, 2013

Particle cleaning of optical elements for microlithography

EHM DIRK HEINRICH3 citations54

DEN BOEF ARIE JEFFREY

1 patent

US8830455B2Sep 9, 2014

Inspection method and apparatus

DEN BOEF ARIE JEFFREY0 citations52

SCACCABAROZZI LUIGI

1 patent

US8405825B2Mar 26, 2013

Method of detecting a particle and a lithographic apparatus

SCACCABAROZZI LUIGI0 citations45

VAINER YURI

1 patent

US9488922B2Nov 8, 2016

Methods and apparatus for inspection of articles, EUV lithography reticles, lithography apparatus and method of manufacturing devices

VAINER YURI0 citations40

IVANOV VITALII

1 patent

US9122178B2Sep 1, 2015

Object inspection systems and methods

IVANOV VITALII0 citations39