Inventor
SUN CHIH-TING
TW9 patents
Patents
9 patentsUS10283496B2May 7, 2019
Integrated circuit filler and method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD10 citations90
US10679980B2Jun 9, 2020
Integrated circuit filler and method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations81
US10388645B2Aug 20, 2019
Integrated circuit filler and method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations81
US11309307B2Apr 19, 2022
Integrated circuit filler and method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations70
US11762302B2Sep 19, 2023
Integrated circuit overlay test patterns and method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations69
US12183729B2Dec 31, 2024
Integrated circuit filler and method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11776948B2Oct 3, 2023
Integrated circuit filler and method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US12271116B2Apr 8, 2025
Method of measuring mask overlay using test patterns
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11016398B2May 25, 2021
Integrated circuit overlay test patterns and method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59