Inventor
DECKERS DAVID FRANS SIMON
BE10 patents
Patents
10 patentsUS11054813B2Jul 6, 2021
Method and apparatus for controlling an industrial process using product grouping
ASML NETHERLANDS BV2 citations72
US10996573B2May 4, 2021
Method and system for increasing accuracy of pattern positioning
ASML NETHERLANDS BV2 citations71
US10877381B2Dec 29, 2020
Methods of determining corrections for a patterning process
ASML NETHERLANDS BV1 citations70
US10191390B2Jan 29, 2019
Method for transferring a mark pattern to a substrate, a calibration method, and a lithographic apparatus
ASML NETHERLANDS BV2 citations68
US11782349B2Oct 10, 2023
Methods of determining corrections for a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatus
ASML NETHERLANDS BV0 citations59
US11592753B2Feb 28, 2023
Methods of determining corrections for a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatus
ASML NETHERLANDS BV0 citations59
US11327407B2May 10, 2022
Methods of determining corrections for a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatus
ASML NETHERLANDS BV0 citations59
US11754931B2Sep 12, 2023
Method for determining corrections for lithographic apparatus
ASML NETHERLANDS BV0 citations58
US12366809B2Jul 22, 2025
Methods and apparatus for controlling a lithographic process
ASML NETHERLANDS BV0 citations56
US10915689B2Feb 9, 2021
Method and apparatus to correct for patterning process error
ASML NETHERLANDS BV0 citations49