Inventor
HASTINGS SIMON PHILIP SPENCER
US12 patents
Patents
12 patentsUS12044980B2Jul 23, 2024
Method of manufacturing devices
ASML NETHERLANDS BV3 citations72
US12055904B2Aug 6, 2024
Method to predict yield of a device manufacturing process
ASML NETHERLANDS BV2 citations71
US11803127B2Oct 31, 2023
Method for determining root cause affecting yield in a semiconductor manufacturing process
ASML NETHERLANDS BV3 citations71
US11947266B2Apr 2, 2024
Method for controlling a manufacturing process and associated apparatuses
ASML NETHERLANDS BV5 citations70
US11022892B2Jun 1, 2021
Method of measuring a structure, inspection apparatus, lithographic system and device manufacturing method
ASML NETHERLANDS BV0 citations60
US10598483B2Mar 24, 2020
Metrology method, apparatus and computer program
ASML NETHERLANDS BV1 citations60
US10466594B2Nov 5, 2019
Method of measuring a structure, inspection apparatus, lithographic system and device manufacturing method
ASML NETHERLANDS BV1 citations60
US11714357B2Aug 1, 2023
Method to predict yield of a device manufacturing process
ASML NETHERLANDS BV0 citations59
US11086229B2Aug 10, 2021
Method to predict yield of a device manufacturing process
ASML NETHERLANDS BV1 citations59
US11754931B2Sep 12, 2023
Method for determining corrections for lithographic apparatus
ASML NETHERLANDS BV0 citations58
US11281110B2Mar 22, 2022
Methods using fingerprint and evolution analysis
ASML NETHERLANDS BV0 citations56
US12169366B2Dec 17, 2024
Voltage contrast metrology mark
ASML NETHERLANDS BV0 citations49