Inventor
REHMAN SAMEE UR
US9 patents
Patents
9 patentsUS12032299B2Jul 9, 2024
Metrology method and associated metrology and lithographic apparatuses
ASML NETHERLANDS BV2 citations71
US10551172B2Feb 4, 2020
Metrology method, apparatus and computer program
ASML NETHERLANDS BV2 citations69
US12189305B2Jan 7, 2025
Metrology method and apparatus and computer program
ASML NETHERLANDS BV0 citations62
US10310389B2Jun 4, 2019
Method of measuring, device manufacturing method, metrology apparatus, and lithographic system
ASML NETHERLANDS BV1 citations61
US11754931B2Sep 12, 2023
Method for determining corrections for lithographic apparatus
ASML NETHERLANDS BV0 citations58
US11604419B2Mar 14, 2023
Method of determining information about a patterning process, method of reducing error in measurement data, method of calibrating a metrology process, method of selecting metrology targets
ASML NETHERLANDS BV0 citations57
US11022897B2Jun 1, 2021
Method of determining information about a patterning process, method of reducing error in measurement data, method of calibrating a metrology process, method of selecting metrology targets
ASML NETHERLANDS BV0 citations57
US10585048B2Mar 10, 2020
Method of determining a value of a parameter of interest of a target formed by a patterning process
ASML NETHERLANDS BV0 citations36
US10585354B2Mar 10, 2020
Method of optimizing a metrology process
ASML NETHERLANDS BV0 citations35