Inventor
ACHANTA SATISH
BE6 patents
⚠️ This page may combine multiple inventors who share the name “ACHANTA SATISH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
5 patentsUS10192772B2Jan 29, 2019
Substrate table and lithographic apparatus
ASML NETHERLANDS BV4 citations69
US11086234B2Aug 10, 2021
Substrate holder and a method of manufacturing a device
ASML NETHERLANDS BV2 citations68
US10719019B2Jul 21, 2020
Substrate holder and a method of manufacturing a substrate holder
ASML NETHERLANDS BV4 citations67
US12117736B2Oct 15, 2024
Lithographic apparatus
ASML NETHERLANDS BV0 citations50
US9798251B2Oct 24, 2017
Object holder, lithographic apparatus, device manufacturing method, and method of manufacturing an object holder
ASML NETHERLANDS BV1 citations43