Inventor
JANSSENS STEF MARTEN JOHAN
NL5 patents
Patents
5 patentsUS11199771B2Dec 14, 2021
Pressure control valve, a fluid handling structure for lithographic apparatus and a lithographic apparatus
ASML NETHERLANDS BV2 citations68
US12287570B2Apr 29, 2025
Pressure control valve, a fluid handling structure for lithographic apparatus and a lithographic apparatus
ASML NETHERLANDS BV0 citations57
US12287586B2Apr 29, 2025
Stage system, lithographic apparatus, method for positioning and device manufacturing method
ASML NETHERLANDS BV0 citations55
US11860552B2Jan 2, 2024
Stage system, lithographic apparatus, method for positioning and device manufacturing method
ASML NETHERLANDS BV1 citations55
US12117736B2Oct 15, 2024
Lithographic apparatus
ASML NETHERLANDS BV0 citations50