Inventor
NISHIMURA NAOSUKE
JP10 patents
Patents
10 patentsUS6552308B2Apr 22, 2003
Substrate temperature adjustment apparatus for estimating a time taken until a substrate temperature falls within a target temperature range
CANON KK28 citations90
US7321418B2Jan 22, 2008
Stage apparatus, exposure apparatus, and device manufacturing method
CANON KK11 citations83
US7307692B2Dec 11, 2007
Exposure apparatus and device manufacturing method
CANON KK12 citations83
US11137696B2Oct 5, 2021
Lithography apparatus and method of manufacturing article
CANON KK3 citations70
US11681237B2Jun 20, 2023
Lithography apparatus and method of manufacturing article
CANON KK0 citations60
US12292681B2May 6, 2025
Imprint method, imprint apparatus, and method of manufacturing article
CANON KK0 citations49
US12032283B2Jul 9, 2024
Imprint apparatus and method of manufacturing article
CANON KK0 citations49
US11462404B2Oct 4, 2022
Imprint apparatus and method of manufacturing article
CANON KK0 citations49
US9035248B2May 19, 2015
Drawing apparatus, and method of manufacturing article
CANON KK0 citations49
US7751029B2Jul 6, 2010
Load-lock apparatus, device manufacturing apparatus, and device manufacturing method
CANON KK0 citations39