Inventor

Luo xinan

US4 patents

⚠️ This page may combine multiple inventors who share the name “Luo xinan”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

3 patents

US12469668B2Nov 11, 2025

Systems and methods for compensating dispersion of a beam separator in a single-beam or multi-beam apparatus

ASML NETHERLANDS BV0 citations61

US11614416B2Mar 28, 2023

System and method for aligning electron beams in multi-beam inspection apparatus

ASML NETHERLANDS BV0 citations50

US11961698B2Apr 16, 2024

Replaceable module for a charged particle apparatus

ASML NETHERLANDS BV0 citations44

HERMES MICROVISION INC

1 patent

US11328894B2May 10, 2022

Systems and methods for compensating dispersion of a beam separator in a single-beam or multi-beam apparatus

HERMES MICROVISION INC1 citations61