Inventor
HURTIG ROY E
US7 patents
⚠️ This page may combine multiple inventors who share the name “HURTIG ROY E”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SEMICONDUCTOR SYSTEMS INC
3 patentsUS5392989AFeb 28, 1995
Nozzle assembly for dispensing liquid
SEMICONDUCTOR SYSTEMS INC23 citations90
US5289222AFeb 22, 1994
Drain arrangement for photoresist coating apparatus
SEMICONDUCTOR SYSTEMS INC24 citations90
US5798140AAug 25, 1998
Oscillatory chuck method and apparatus for coating flat substrates
SEMICONDUCTOR SYSTEMS INC22 citations89