Inventor
HARMS MARGRET
DE7 patents
Patents
7 patentsUS4994141AFeb 19, 1991
Method of manufacturing a mask support of SiC for radiation lithography masks
PHILIPS CORP22 citations86
US4468799AAug 28, 1984
Radiation lithography mask and method of manufacturing same
PHILIPS CORP19 citations79
US4941942AJul 17, 1990
Method of manufacturing a mask support of sic for x-ray lithography masks
PHILIPS CORP20 citations73
US4386114AMay 31, 1983
Method of manufacturing a thin-film magnetic field sensor
PHILIPS CORP12 citations72
US4555460ANov 26, 1985
Mask for the formation of patterns in lacquer layers by means of X-ray lithography and method of manufacturing same
PHILIPS CORP6 citations68
US4606803AAug 19, 1986
Method of manufacturing a mask for the production of patterns in lacquer layers by means of X-ray lithography
PHILIPS CORP7 citations61
US4946751AAug 7, 1990
Method of manufacturing a mask for radiation lithography
PHILIPS CORP5 citations55