Inventor

BRUNS ANGELIKA

DE2 patents

Patents

2 patents

US4555460ANov 26, 1985

Mask for the formation of patterns in lacquer layers by means of X-ray lithography and method of manufacturing same

PHILIPS CORP6 citations68

US4946751AAug 7, 1990

Method of manufacturing a mask for radiation lithography

PHILIPS CORP5 citations55